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Vacuum Evaporation Machine
This range of Vacuum Evaporation Machines is developed for both the R&D and the production by batch depending on the equipment configuration. These different machines are both standard machines but remain adaptable to specific requests.
EVA300
The EVA300 is a PVD Thin Film Coating Frame intended for the R&D. Robustness, scalability and compactness are its main assets.
EVA450
Halfway from development to production tool, this vacuum evaporator has been developed so as to offer multiple configurations.
EVA600
With a 600 mm diameter base plate, this equipment complements perfectly our range of solutions for
PVD thin films vacuum evaporation.
EVA760
Thanks to its volume, the can be set up using a wide range of complex configurations. This equipment can handle a wide range of substrates per run.
Comparative features of the Vacuum Evaporation EVA Machines
| EVA300 | EVA450 | EVA600 | EVA760 | |
|---|---|---|---|---|
| Chamber Dimensions (mm) | Ø300 x 450 | Ø450 x 600 | Ø600 x 800 | Ø760 x 920 |
| Usable Coating Surface (mm) * | Ø260 | Ø415 | Ø520 | Ø720 |
| Coating Surface Uniformity | ± 2% | ± 2% | ± 2% | ± 2% |
