{"id":44,"date":"2019-05-14T11:20:33","date_gmt":"2019-05-14T09:20:33","guid":{"rendered":"https:\/\/www.alliance-concept.com\/en\/?page_id=44"},"modified":"2021-04-12T10:38:55","modified_gmt":"2021-04-12T08:38:55","slug":"cluster-range-pvd","status":"publish","type":"page","link":"https:\/\/www.alliance-concept.com\/en\/cluster-range-pvd.html","title":{"rendered":"CLUSTERTOOL range"},"content":{"rendered":"<p>[vc_row full_width=&#8221;stretch_row&#8221; css=&#8221;.vc_custom_1572780184244{background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}&#8221;][vc_column][vc_column_text]<\/p>\n<h1 style=\"text-align: left;\"><strong>CLUSTERTOOL, Thin Films Deposition Cluster<\/strong><\/h1>\n<p>The <strong>clustertool<\/strong> range is our <strong>latest system of thin films deposition<\/strong>. It is the result of a 25 year-experience in the design of <strong>special PVD equipment<\/strong>.<\/p>\n<p>The main element of the machine\u2019s architecture is the <strong class=\"d2b\">Vacuum Transfer Robot<\/strong> developed by Alliance Concept Engineering Department. The maximum capacity of the robot is a 300mm diameter substrate with a weight of 1.5kg. Chambers with isolation valves are placed around the robot to remove the particle contamination between modules.<\/p>\n<p>We have studied and realized various configurations to be able to work with <strong class=\"d2b\">sputtering coating chambers<\/strong>: a <strong class=\"d2b\">PVD configuration<\/strong> and\/or an <strong class=\"d2b\">evaporator configuration<\/strong>. Finally, a port is dedicated for the loading and unloading load-lock.[\/vc_column_text][\/vc_column][\/vc_row][vc_row full_width=&#8221;stretch_row&#8221; gap=&#8221;20&#8243; equal_height=&#8221;yes&#8221; css=&#8221;.vc_custom_1574086866675{background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}&#8221;][vc_column width=&#8221;1\/2&#8243; css=&#8221;.vc_custom_1574086917959{background-color: #ffffff !important;border-radius: 10px !important;}&#8221; el_class=&#8221;blocmachine&#8221;][vc_empty_space height=&#8221;20px&#8221;][vc_column_text]<\/p>\n<h3 style=\"text-align: center;\"><span style=\"color: #e41a14;\">CT100<\/span><\/h3>\n<p>[\/vc_column_text][vc_empty_space height=&#8221;20px&#8221;][vc_single_image image=&#8221;2020&#8243; alignment=&#8221;center&#8221; el_class=&#8221;photomachine&#8221;][vc_column_text el_class=&#8221;textmarg80&#8243;]This <strong>PVD cluster<\/strong> is able to provide a <strong>high-quality multi-chamber clustertool system, <\/strong>at a controlled cost which will adapt to the tightest budgets. The equipment consists of two modules based on our best-sellers\u2019 designs, the <a href=\"https:\/\/www.alliance-concept.com\/en\/dp-range-vacuum-magnetron-sputtering.html\">DP650 system<\/a> or the <a href=\"https:\/\/www.alliance-concept.com\/en\/dp-range-vacuum-magnetron-sputtering.html\">AC450 system<\/a>, isolated from each other by a load-lock allowing a near-zero particle contamination.[\/vc_column_text][\/vc_column][vc_column width=&#8221;1\/2&#8243; css=&#8221;.vc_custom_1574086942575{background-color: #ffffff !important;border-radius: 10px !important;}&#8221; el_class=&#8221;blocmachine&#8221;][vc_empty_space height=&#8221;20px&#8221;][vc_column_text]<\/p>\n<h3 style=\"text-align: center;\"><span style=\"color: #e41a14;\">CT200<\/span><\/h3>\n<p>[\/vc_column_text][vc_empty_space height=&#8221;20px&#8221;][vc_images_carousel images=&#8221;2024,2021&#8243; img_size=&#8221;full&#8221; speed=&#8221;3000&#8243; autoplay=&#8221;yes&#8221; hide_pagination_control=&#8221;yes&#8221; wrap=&#8221;yes&#8221;][vc_column_text el_class=&#8221;textmarg80&#8243;]The CT200 is one of the most <strong class=\"d2b\">advanced clustertools<\/strong> of its generation. With an experience of 25 years, it is the latest tool for <strong class=\"d2b\">thin films deposition<\/strong>.<\/p>\n<p>Versatile and scalable equipment intended to be installed in a clean room, this <strong class=\"d2b\">PVD cluster<\/strong> is based on a <strong class=\"d2b\">central transfer chamber<\/strong> equipped with a reliable and safe <strong>vacuum robot<\/strong> of our design. From this chamber, the substrates are distributed to the different process modules.\u00a0This machine <span class=\"fort\">can be made up of different modules up to 6<\/span>, around a transfer chamber.[\/vc_column_text][vc_btn title=&#8221;Download the brochure&#8221; style=&#8221;custom&#8221; custom_background=&#8221;#e41a14&#8243; custom_text=&#8221;#ffffff&#8221; align=&#8221;center&#8221; css_animation=&#8221;zoomIn&#8221; link=&#8221;url:https%3A%2F%2Fwww.alliance-concept.com%2Fwp-content%2Fuploads%2Fbrochure%2FUK%2FCT200_en.pdf|title:Brochure%20CT200|target:%20_blank|&#8221; css=&#8221;.vc_custom_1618216732475{margin-top: 20px !important;margin-bottom: 20px !important;}&#8221; el_class=&#8221;boutbroch&#8221;][\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text]<\/p>\n<h3 style=\"text-align: center;\">PVD Clusters Features<\/h3>\n<p>[\/vc_column_text][vc_column_text]<\/p>\n<p style=\"text-align: center;\">\n<table id=\"tablepress-6\" class=\"tablepress tablepress-id-6 table53\">\n<thead>\n<tr class=\"row-1\">\n\t<td class=\"column-1\"><\/td><th class=\"column-2\">CT100<\/th><th class=\"column-3\">CT200<\/th>\n<\/tr>\n<\/thead>\n<tbody class=\"row-striping row-hover\">\n<tr class=\"row-2\">\n\t<td class=\"column-1\">Load-Lock Chamber<\/td><td class=\"column-2\">Manual<\/td><td class=\"column-3\">Automatic single plate<br \/>\n or semi K7<br \/>\n<\/td>\n<\/tr>\n<tr class=\"row-3\">\n\t<td class=\"column-1\">Coating Chamber<\/td><td class=\"column-2\">AC450 and\/or DP650<\/td><td class=\"column-3\">AC450,DP650,DP850,RIE,EVA or tailor-made<\/td>\n<\/tr>\n<tr class=\"row-4\">\n\t<td class=\"column-1\">Usable Coating Surface (mm)*<\/td><td class=\"column-2\">&Oslash;200<\/td><td class=\"column-3\">&Oslash;200 and &Oslash;300<\/td>\n<\/tr>\n<tr class=\"row-5\">\n\t<td class=\"column-1\">Coating Surface Uniformity<\/td><td class=\"column-2\">&plusmn; 2%<\/td><td class=\"column-3\">&plusmn; 2%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<!-- #tablepress-6 from cache --><\/p>\n<div class=\"exemple\">*Usable coating surface given as an example<\/div>\n<p>[\/vc_column_text][\/vc_column][\/vc_row][vc_row][vc_column][vc_btn title=&#8221;CONTACT US&#8221; style=&#8221;custom&#8221; custom_background=&#8221;#e41a14&#8243; custom_text=&#8221;#ffffff&#8221; size=&#8221;lg&#8221; align=&#8221;right&#8221; css_animation=&#8221;zoomIn&#8221; link=&#8221;url:https%3A%2F%2Fwww.alliance-concept.com\/en%2Fcontact.html|title:Contact||&#8221; css=&#8221;.vc_custom_1584020999425{margin-top: 20px !important;margin-bottom: 20px !important;}&#8221;][\/vc_column][\/vc_row]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>[vc_row full_width=&#8221;stretch_row&#8221; css=&#8221;.vc_custom_1572780184244{background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}&#8221;][vc_column][vc_column_text] CLUSTERTOOL, Thin Films Deposition Cluster The clustertool range is our latest system of thin films deposition. It is the result of a 25 year-experience in the design of special PVD equipment. The main element of the machine\u2019s architecture is the Vacuum [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-44","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Thin film synthesis system, manufacture of PVD cluster<\/title>\n<meta name=\"description\" content=\"Alliance Concept manufacture thin film coating chambers. 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