{"id":1270,"date":"2019-09-09T17:01:51","date_gmt":"2019-09-09T15:01:51","guid":{"rendered":"https:\/\/www.alliance-concept.com\/en\/?page_id=1270"},"modified":"2020-05-14T14:10:08","modified_gmt":"2020-05-14T12:10:08","slug":"thin-film-deposition","status":"publish","type":"page","link":"https:\/\/www.alliance-concept.com\/en\/thin-film-deposition.html","title":{"rendered":"Thin Films Deposition"},"content":{"rendered":"<p>[vc_row css=&#8221;.vc_custom_1589458171483{background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}&#8221;][vc_column][vc_column_text el_class=&#8221;titrepage&#8221;]<\/p>\n<h1><strong>Thin Films Deposition<\/strong><\/h1>\n<p>[\/vc_column_text][vc_row_inner][vc_column_inner width=&#8221;1\/2&#8243;][vc_column_text css=&#8221;.vc_custom_1581538162005{border-left-width: 4px !important;padding-left: 10px !important;border-left-color: #414649 !important;border-left-style: solid !important;}&#8221;]Alliance Concept is a <strong>supplier of high-end turnkey PVD equipment<\/strong>.\u00a0The development and the production of <strong class=\"d2b\">Thin Films Deposition frames<\/strong> is one of our main activities.[\/vc_column_text][vc_column_text]We are experts in <strong class=\"d2b\">physical deposition<\/strong> (<strong class=\"d2b\">PVD: Physical Vapor Deposition<\/strong>), whether by:<\/p>\n<ul>\n<li>Magnetron <strong class=\"d2b\">Cathode Sputtering<\/strong><\/li>\n<li>Diode <strong class=\"d2b\">Cathode Sputtering<\/strong><\/li>\n<li><strong class=\"d2b\">Vacuum evaporation<\/strong> by Joule effect<\/li>\n<li><strong class=\"d2b\">Vacuum evaporation<\/strong> by electron gun<\/li>\n<\/ul>\n<p>[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/2&#8243;][vc_single_image image=&#8221;1274&#8243; css_animation=&#8221;slideInRight&#8221;][\/vc_column_inner][\/vc_row_inner][vc_column_text]More than 80% of our <strong class=\"d2b\">PVD thin films deposition equipment<\/strong> are installed in clean rooms.\u00a0In terms of thickness, the <strong class=\"d2b\">thin films deposited<\/strong> are below the micron in the nanometer range.\u00a0We also carry out <strong class=\"d2b\">PECVD<\/strong> (Plasma Enhanced Chemical Vapor Deposition) frames, being at the limit of chemical or <strong class=\"d2b\">CVD deposition<\/strong> (Chemical Vapor Deposition), a complementary technology.[\/vc_column_text][\/vc_column][\/vc_row][vc_row full_width=&#8221;stretch_row&#8221; css=&#8221;.vc_custom_1574603313953{margin-top: 30px !important;margin-bottom: 30px !important;padding-top: 25px !important;padding-bottom: 25px !important;background-color: #ffffff !important;}&#8221;][vc_column][vc_column_text]<strong><span style=\"color: #e41a14;\">Cathode Sputtering<\/span><\/strong><\/p>\n<p>The principle of this technology lies in the <strong>creation of a glow discharge<\/strong> between two electrodes. This discharge, carried out within a rarefied atmosphere, <strong class=\"d2b\">under vacuum<\/strong>, allows the making of a plasma composed of charged particles (electrons, ions, photons) and neutrals (atoms). The electric field generated by the difference in potential induces a movement of positively charged particles that are attracted by the cathode (target) and collide with it. This bombardment causes the <strong>sputtering of atoms or aggregates of atoms<\/strong> from the target which will condense on the substrate. On a macroscopic scale, this physical phenomenon could be compared to a \u201cbilliard breakage\u201d. In order to have an effective sputtering rate, the <strong class=\"d2b\">plasma gas<\/strong> used for this technology is the argon gas. Its atomic mass, its neutrality (complete valence shell), as well as its cost are ideal.<\/p>\n<p>The main steps are:[\/vc_column_text][vc_row_inner][vc_column_inner width=&#8221;1\/2&#8243;][vc_column_text]<\/p>\n<p style=\"text-align: center;\">Collision of incident ions on the target resulting in a transfer of kinetic energy and motion amount.<\/p>\n<p>[\/vc_column_text][vc_single_image image=&#8221;2745&#8243; alignment=&#8221;center&#8221; onclick=&#8221;zoom&#8221;][\/vc_column_inner][vc_column_inner width=&#8221;1\/2&#8243;][vc_column_text]<\/p>\n<p style=\"text-align: center;\"><strong class=\"d2b\">Emission of atoms<\/strong> or aggregates with a given kinetic energy that settle down on the substrate and become a thin film of target material.<\/p>\n<p>[\/vc_column_text][vc_single_image image=&#8221;2318&#8243; alignment=&#8221;center&#8221; onclick=&#8221;zoom&#8221;][\/vc_column_inner][\/vc_row_inner][vc_column_text]This technology, commonly used in the industry of <strong>thin films<\/strong> for the semiconductor industry, sees its number of applications increase.\u00a0 Being a clean technology, it is a realistic and practical alternative to wet treatments.<\/p>\n<p>The great majority of this type of <strong class=\"d2b\">PVD equipment<\/strong> uses <strong>magnetron cathode sputtering technology<\/strong>.[\/vc_column_text][\/vc_column][\/vc_row][vc_row][vc_column][vc_column_text]<strong><span style=\"color: #e41a14;\">Vacuum Evaporation<\/span><\/strong><\/p>\n<p>Unlike <strong class=\"d2b\">magnetron cathode sputtering<\/strong> or <strong class=\"d2b\">diode cathode sputtering<\/strong> which is based on a mechanical principle of atomic bombardment or more exactly <strong class=\"d2b\">ionic bombardment<\/strong>, <strong>vacuum evaporation<\/strong> is based on a thermal principle. Thus, the heating allows the material to reach its melting point first and its evaporating point in a second time.<\/p>\n<p><strong>Vacuum evaporation<\/strong> is based on two basic processes: evaporation from a heated source and condensation in the solid state of the evaporated material on the substrate.[\/vc_column_text][vc_row_inner gap=&#8221;15&#8243;][vc_column_inner width=&#8221;2\/3&#8243;][vc_column_text]The heating of the material can be generated by several techniques:<\/p>\n<ul>\n<li><strong>Joule Effect Evaporation<\/strong>: A one-hundred-ampere electric current goes through the material to be evaporated<\/li>\n<li><strong>Evaporation by Electronic Bombardment<\/strong> (electron gun evaporation)<\/li>\n<li><strong>Evaporation by effusion<\/strong><\/li>\n<\/ul>\n<p>These technologies enable to control in a very precise manner the deposition thickness. They are also very reproducible and extremely clean. No effluent or anything else comes out of the equipment.[\/vc_column_text][\/vc_column_inner][vc_column_inner width=&#8221;1\/3&#8243;][vc_single_image image=&#8221;2330&#8243; alignment=&#8221;center&#8221; onclick=&#8221;zoom&#8221; css_animation=&#8221;fadeIn&#8221;][\/vc_column_inner][\/vc_row_inner][\/vc_column][\/vc_row][vc_row full_width=&#8221;stretch_row&#8221; css=&#8221;.vc_custom_1574603551608{margin-top: 30px !important;padding-top: 25px !important;padding-bottom: 25px !important;background-color: #ffffff !important;}&#8221;][vc_column][vc_column_text]<\/p>\n<h3>More about the Thin Films Deposition<\/h3>\n<p>[\/vc_column_text][vc_row_inner equal_height=&#8221;yes&#8221; gap=&#8221;20&#8243;][vc_column_inner el_class=&#8221;blocmachine&#8221; width=&#8221;1\/2&#8243; css=&#8221;.vc_custom_1574603404412{background-color: #eeeeee !important;border-radius: 10px !important;}&#8221;][vc_column_text]<strong>Why work under vacuum?<\/strong><\/p>\n<p>The deposition of pure materials can only be carried out in a <strong class=\"d2b\">rarefied atmosphere<\/strong>, without other elements with which they could recombine. In fact, if we try for example to make a <strong class=\"d2b\">metal deposition at atmospheric pressure<\/strong>, this would lead to the growth of a <strong class=\"d2b\">metal oxynitride film deposition<\/strong> of this metal given the presence of dioxygen and <strong class=\"d2b\">nitrous oxyde<\/strong> in the air.[\/vc_column_text][\/vc_column_inner][vc_column_inner el_class=&#8221;blocmachine&#8221; width=&#8221;1\/2&#8243; css=&#8221;.vc_custom_1574603414272{background-color: #eeeeee !important;border-radius: 10px !important;}&#8221;][vc_column_text]<strong>Can all types of material can be deposited?<\/strong><\/p>\n<p>Metal materials, ceramics, oxides, nitrides, etc., can be synthesized with these technologies. By combining the sources, it is also possible, under certain conditions, to make all types of alloys (binary, ternary, see more).[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][vc_empty_space][vc_column_text]<\/p>\n<div id=\"conteneur\">\n<div id=\"contenu\">\n<div class=\"chapo\">\n<p><strong>Sizes features:<\/strong><\/p>\n<table class=\"spip\">\n<tbody>\n<tr class=\"row_even\">\n<td><strong>Technology<\/strong><\/td>\n<td><strong>Incident Particles Speed<\/strong><\/td>\n<td><strong>Work Pressure<\/strong><\/td>\n<td><strong>Incident Particles Energy<\/strong><\/td>\n<\/tr>\n<tr class=\"row_odd\">\n<td><strong>Cathode Sputtering<\/strong><\/td>\n<td>4 to 10 km\/s<\/td>\n<td>5.10<sup>-3<\/sup>\u00a0&#8211; 10<sup>-2<\/sup>\u00a0mbar<\/td>\n<td>4 to 50 eV<\/td>\n<\/tr>\n<tr class=\"row_even\">\n<td><b>Vacuum Evaporation<\/b><\/td>\n<td>1 km\/s<\/td>\n<td>5.10<sup>-4<\/sup>\u00a0&#8211; 5.10<sup>-3<\/sup>\u00a0mbar<\/td>\n<td>0,2 eV<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>These quantities can help to determine whether it is preferable to use a particular technology for a given application.<\/p>\n<\/div>\n<\/div>\n<\/div>\n<p>[\/vc_column_text][\/vc_column][\/vc_row][vc_row css=&#8221;.vc_custom_1574603523307{padding-bottom: 35px !important;}&#8221;][vc_column][vc_btn title=&#8221;CONTACT US&#8221; style=&#8221;custom&#8221; custom_background=&#8221;#dd3333&#8243; custom_text=&#8221;#ffffff&#8221; size=&#8221;lg&#8221; align=&#8221;right&#8221; css_animation=&#8221;slideInRight&#8221; link=&#8221;url:https%3A%2F%2Fwww.alliance-concept.com\/en%2Fcontact.html|||&#8221;][\/vc_column][\/vc_row]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>[vc_row css=&#8221;.vc_custom_1589458171483{background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}&#8221;][vc_column][vc_column_text el_class=&#8221;titrepage&#8221;] Thin Films Deposition [\/vc_column_text][vc_row_inner][vc_column_inner width=&#8221;1\/2&#8243;][vc_column_text css=&#8221;.vc_custom_1581538162005{border-left-width: 4px !important;padding-left: 10px !important;border-left-color: #414649 !important;border-left-style: solid !important;}&#8221;]Alliance Concept is a supplier of high-end turnkey PVD equipment.\u00a0The development and the production of Thin Films Deposition frames is one of our main activities.[\/vc_column_text][vc_column_text]We are experts in [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-1270","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Thin film deposition, design an manufacturing of PVD machines<\/title>\n<meta name=\"description\" content=\"Alliance Concept build thin film deposition machines for industrial applications. 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