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Vacuum
chambers
- Wall chamber
resistance calculation
- Steel / stainless steel / Aluminum work
chamber
- Heated / cooled work chamber
- Limited outgassing system
- Simple or multi-samples load lock
- Mechanical / electrolytic wall polishing
- Ultimate vacuum up to 10-8 atm.cm3.s-1
- Sealing for any type of application
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Cooled
stainless steel vacuum chamber
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Vacuum
mechanism
- Tight feedthrough with rotation, translation
or combined movement
- Dual seals system with differential pumping
or magnetic feedthrough system
- Robotics under vacuum (SCARA robots,
programmed trajectories, teaching)
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Vacuum mechanim
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Pumping
systems
- Vacuum pump integration (rough/secondary)
- Pumping system calculation
- Overhauling / reconditioning of existing
pumping systems
- Pumping and leak detection combined systems
- Specials pumping modules (explosion proof,
leak proof, corrosive gases)
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Pumping system |
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