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Vacuum chambers



  • Wall chamber resistance calculation
  • Steel / stainless steel / Aluminum work chamber
  • Heated / cooled work chamber
  • Limited outgassing system
  • Simple or multi-samples load lock
  • Mechanical / electrolytic wall polishing
  • Ultimate vacuum up to 10-8 atm.cm3.s-1
  • Sealing for any type of application

Cooled stainless steel vacuum chamber
Cooled stainless steel vacuum chamber

Vacuum mechanism



  • Tight feedthrough with rotation, translation or combined movement
  • Dual seals system with differential pumping or magnetic feedthrough system
  • Robotics under vacuum (SCARA robots, programmed trajectories, teaching)
Vacuum mechanim
Vacuum mechanim

Pumping systems



  • Vacuum pump integration (rough/secondary)
  • Pumping system calculation
  • Overhauling / reconditioning of existing pumping systems
  • Dry pumping systems
  • Pumping and leak detection combined systems
  • Specials pumping modules (explosion proof, leak proof, corrosive gases)
Pumping system
Pumping system
 

Last modification : 27/05/05